Densification effects in diethylsilane-based low-temperature silicon oxide films and a novel hydrogenation process for polycrystalline silicon thin film transistors

Densification effects in diethylsilane-based low-temperature silicon oxide films and a novel hydrogenation process for polycrystalline silicon thin film transistors

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Energy band diagrams are important visual aids in understanding the operational and internal status of the MOS system. The metal work ... shown in Figure 3.2. Figure 3.2: Equilibrium band diagram of a metal-oxide-semiconductor system at 16.


Title:Densification effects in diethylsilane-based low-temperature silicon oxide films and a novel hydrogenation process for polycrystalline silicon thin film transistors
Author: Danny Li-Ping Chen
Publisher: - 2000
ISBN-13:

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